Installation
SECS/GEM Explorer is a native macOS app, not on the Mac App Store. Download the notarized DMG, open it, and drag the app to Applications.
Download
- Free download: dl-secsgem-explorer.voltrus.id
- Pro licence: $39.99 one-time from the Voltrus Console. One key activates one Mac and can be moved.
System Requirements
| Requirement | Minimum |
|---|---|
| macOS | 13 Ventura or newer (Apple Silicon and Intel) |
| Equipment | A tool with an HSMS-SS (SEMI E37) interface reachable over TCP, set to accept your Mac as the host |
Licence activation needs an internet connection once. Afterwards the app works offline.
Quick Start
Act as a host
- Enter the equipment's address, HSMS port and device ID, then Connect. The app opens the HSMS session (Select) and shows the exchange in the log.
- Establish communications (S1F13). The equipment's model and software revision appear.
- Use the tabs: Status variables, Constants, Events, Alarms, Commands, Programs, Terminal and Messages. Every message is shown as SML.
Without equipment
- Set Mode to Simulator (Pro) and start the equipment simulator.
- Connect the host side to 127.0.0.1 on the simulator's port.
Configuration
| Setting | Default |
|---|---|
| Simulator address / port | 127.0.0.1 / 5000 |
| Device ID | 0 |
| HSMS timers (E37 defaults) | T3 45 s, T5 10 s, T6 5 s, T7 10 s, T8 5 s |
The free version keeps one saved profile and streams 10 status variables live. Pro removes both limits.
Free and Pro
Everything not listed below stays free, including connecting, establishing communications, reading status variables and constants, alarms, process programs, terminal messages and the message log. Pro adds the equipment simulator, live trends, equipment constant writes with range checks, the report wizard with a live S6F11 event table, remote commands (S2F41), the SML composer, CSV export, and unlimited saved profiles.
Equipment simulator (Pro)
A wafer processing chamber behind a GEM interface. It runs passive (it listens, default 127.0.0.1:5000, device ID 0) or active (it connects to a host and reconnects after T5). It has a control state model (offline, online local, online remote), a process state, status variables, equipment constants with ranges, events, three alarms, a process program list and terminal display. Remote commands START, STOP, PAUSE and RESUME work while it is online remote. Its ids, names, ranges and alarm texts are made up, not recorded from a real tool.
Not implemented: spooling, trace data, limits monitoring, multi-block messages, process program transfer, TLS and SECS-I (serial). Use the SML composer for other messages; the simulator answers unknown ones with S9F5.
Troubleshooting
- Connection fails or drops: check the address, port and device ID, that the equipment accepts your Mac as host, and the Messages tab for the HSMS Select status and timer errors.
- S9Fx errors: the equipment did not recognize a message or its device ID. The log shows which transaction it was about.
- Values look wrong: real tools differ in id types and optional items; try the SML composer to send the exact message.
- Licence key rejected: enter it with its dashes, with internet access for the first activation. See Support.
Support
Email [email protected] or see the support page. SECS/GEM, SECS-II and HSMS are standards of SEMI; SECS/GEM Explorer is an independent implementation and is not affiliated with or certified by SEMI.