Support

Getting help with SECS/GEM Explorer

Frequently Asked Questions

I cannot connect to my equipment.

Check the address, the HSMS port (often 5000) and the device ID, and that the equipment accepts a passive HSMS connection from your Mac's IP address. Many tools only allow a configured host address. Press Connect and read the Messages tab: it shows the HSMS Select exchange and any timeout (T5, T6, T7, T8).

Communications do not establish, or messages time out.

The equipment must answer S1F13 with a COMMACK of 0. If a reply takes longer than T3 (45 seconds by default) the call fails. Some tools use a different device ID or different id types in their messages, so check the device ID first, then the Messages tab for an S9Fx error from the equipment.

Has this been tested on real equipment?

No. SECS/GEM Explorer is a Beta. It has been cross-checked against the open-source secsgem library as host and as equipment, and never against real semiconductor equipment or a commercial host. Real tools differ in id types, optional items and which GEM capabilities they implement. Please start read-only, and send us what the Messages tab shows if something fails.

Is it safe to use on a production tool?

Reading status variables and constants does not change anything. Equipment constant writes, remote commands, going offline or online, and raw messages can change the state of a tool. They are Pro features and the app asks you to confirm before sending, but test them against the built-in equipment simulator first, and never send them to a tool that is processing product unless you know what the message does.

How do I test without equipment?

Switch Mode to Simulator (Pro) and start the equipment simulator, a wafer processing chamber behind a GEM interface (default 127.0.0.1, port 5000, device ID 0). Then connect the host side to it, or connect any other host to it. Its ids, names and ranges are made up.

Only some status variables update live.

The free version streams 10 status variables live. Pro streams all of them and adds live trends.

My licence key does not work.

Enter the full key as sent, including the dashes. The first activation needs an internet connection so the app can validate the key; afterwards the app works offline. One key activates one Mac. To use it on a new Mac, enter it there and choose to move the licence, or remove the key from the old Mac first. If it still fails, contact support below.

The app does not open.

SECS/GEM Explorer needs macOS 13 (Ventura) or later. The download is signed and notarized by Apple. If macOS still shows a warning, right-click the app, choose Open, then confirm once.

Contact Support

Email

For bug reports, equipment reports, licence issues, or general questions.

[email protected]

Please include:

  • SECS/GEM Explorer version
  • macOS version and Mac model (Intel or Apple Silicon)
  • The equipment make, model and software revision (the S1F14 reply shows it)
  • What the communication log shows
  • Steps to reproduce the issue

Response Time

We reply within two business days. A full fix for a complex issue may take longer.

Refund Policy

Direct purchases (card via Polar): Contact us at the email above within 14 days of purchase for a full refund. Full details: Refund Policy.

SECS/GEM, SECS-II and HSMS are standards of SEMI. SECS/GEM Explorer is an independent implementation and is not affiliated with, endorsed by or certified by SEMI.